发明名称 |
PHOTOSENSITIVE BODY AND PRODUCTION THEREOF |
摘要 |
PURPOSE:To improve the smoothness and wear resistance of a specific film consisting of carbon or essentially consisting of carbon by providing a layer consisting of an org. resin on a photoconductive layer and forming said film thereon. CONSTITUTION:An org. photoconductive material is coated on a base substrate of a metal and a barrier layer consisting of an org. resin is provided at need thereon. The film (A) consisting of carbon or essentially consisting of carbon is formed as a wear resistant layer thereon. The film A has 0.1-5mum thickness and is preferably the film added with hydrogen or halogen. The film A is preferably formed by a vapor phase method using a whistler mode resonance or glow discharge method. |
申请公布号 |
JPH01189658(A) |
申请公布日期 |
1989.07.28 |
申请号 |
JP19880015584 |
申请日期 |
1988.01.25 |
申请人 |
SEMICONDUCTOR ENERGY LAB CO LTD |
发明人 |
YAMAZAKI SHUNPEI |
分类号 |
G03G5/08;C23C16/26;C23C16/27;C23C16/50;C23C16/511;G03G5/043;G03G5/06;G03G5/082;G03G5/14;G03G5/147;H01L31/08 |
主分类号 |
G03G5/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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