| 摘要 |
<p>PURPOSE:To accurately position by providing optical semiconductor substrate positioning means at the stage placing face side of a semiconductor substrate. CONSTITUTION:A light source light 10 radiated from a light source 8 is split to two directions by a prism 5b, fed through a prism 5a, a positioning lens 4b and an exposure lens 1, etc., to a reticle 12a, and reflected through a positioning pattern 13a by a mirror 3a. The reflected light 11 is introduced through the reverse passage of the route of the light 10 to a light quantity detection meter 7. Here, a reticle 12a is finely moved to be positioned. Then, a semiconductor substrate 15 is secured to a stage 2a, and the light 10 is irradiated from the light source 8. The light 10 split by the prism 5b to two lights is introduced to the end of a positioning mark 19a on a substrate placing face to be scattered. Part of the scattered light 14a is again introduced to the meter 7. Here, the stage 2a is finely moved to finely move the mark 19a, and the peak of the light quantity change of the light 14a is read by the meter 7, thereby positioning the substrate 15.</p> |
