FORMING METHOD OF THIN FILM,申请号JP19880014010-传众专利搜索

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发明名称	FORMING METHOD OF THIN FILM
摘要
申请公布号	JPH01189129(A)	申请公布日期	1989.07.28
申请号	JP19880014010	申请日期	1988.01.25
申请人	SHARP CORP	发明人	YAMAGISHI KOJI
分类号	H01L21/316;H01L21/205;H01L21/31	主分类号	H01L21/316
代理机构		代理人
主权项
地址

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