| 摘要 |
PURPOSE:To keep the interval between and the parallelism of the base of a frame and a movable element with high accuracy and thereby cause them to be easily fabricated by integrally forming the base of a frame and a movable element opposed to the former across the interval in which piezoelectric elements can be inserted, with the frame using a connection part, fixing leaf springs to the frame and the movable element and forming a separation groove in the connection part to separate the frame from the movable element. CONSTITUTION:A base 3 is projected laterally on one end of a frame 2, and a movable element 5 is integrally formed with a frame 2 though a connection part 20 at an interval L in which a piezoelectric element 1 and wedge parts 13, 14 can be inserted. The bases of a pair of leaf springs 6, 7 with a tilting element 8 are inserted into an installation groove 21, and the groove sides and each side of the corresponding paired leaf springs are fixed by brazing. The paired leaf springs 6, 7 and a supporting member 12 are assembled into between the frame 2 and the movable element 5, and a separation groove 22 is machined in an area extending from under the lower surface of the connection part 20 to the bottom of an installation groove 21 to separate the frame from the movable element 5. Thus an interval L between and the parallelism of the base 3 of the frame 2 and the movable element 5 are obtained with high accuracy. |
