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经营范围
发明名称
REACTIVE SPUTTERING DEVICE
摘要
申请公布号
JPH01188669(A)
申请公布日期
1989.07.27
申请号
JP19880011506
申请日期
1988.01.20
申请人
SEKIYU KODAN;KINZOKUKEI ZAIRYO KENKYU KAIHATSU CENTER
发明人
AZUMA YOSHIZO;KUMAKIRI TADASHI;AKARI KOUICHIROU;MUNEMASA ATSUSHI
分类号
C23C14/34
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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