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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH01187931(A)
申请公布日期
1989.07.27
申请号
JP19880013074
申请日期
1988.01.22
申请人
NEC YAMAGATA LTD
发明人
HIROSE TAKASHI
分类号
H01L21/306
主分类号
H01L21/306
代理机构
代理人
主权项
地址
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