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发明名称
摘要
申请公布号	JPH0124985(Y2)	申请公布日期	1989.07.27
申请号	JP19800128000U	申请日期	1980.09.09
申请人		发明人
分类号	H03M1/36;H01L21/66;H01L21/822;H01L27/04;H03M1/10;H03M1/38;(IPC1-7):H03M1/10	主分类号	H03M1/36
代理机构		代理人
主权项
地址

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