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发明名称
ACTIVATING METHOD FOR IMPURITY
摘要
申请公布号
JPH01187813(A)
申请公布日期
1989.07.27
申请号
JP19880011960
申请日期
1988.01.21
申请人
NEC CORP
发明人
TANIGAWA AKIO
分类号
C30B31/22;C30B33/00;H01L21/26;H01L21/265
主分类号
C30B31/22
代理机构
代理人
主权项
地址
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