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发明名称
SEMICONDUCTOR ELEMENT SEPARATION CONSTRUCTION AND MANUFACTURE THEREOF
摘要
申请公布号
JPH01186645(A)
申请公布日期
1989.07.26
申请号
JP19880007182
申请日期
1988.01.14
申请人
NEC CORP
发明人
FUKUMA MASAO
分类号
H01L21/76
主分类号
H01L21/76
代理机构
代理人
主权项
地址
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