IMPIANTO DA VUOTO A DOPPIA CAMERA PER PROCESSI DI DEPOSIZIONE DI STRATI SOTTILI,申请号IT19890048236-传众专利搜索

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发明名称	IMPIANTO DA VUOTO A DOPPIA CAMERA PER PROCESSI DI DEPOSIZIONE DI STRATI SOTTILI
摘要
申请公布号	IT8948236(D0)	申请公布日期	1989.07.26
申请号	IT19890048236	申请日期	1989.07.26
申请人	CONSORZIO CE.TE.V	发明人	CARLO MISIANO;ENRICO SIMONETTI
分类号	B01J3/00;C23C14/56	主分类号	B01J3/00
代理机构		代理人
主权项
地址

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