Method of heating a quartz glass tube.

摘要

A method of heating a quartz glass tube (1) with a microwave, which method comprises supplying a gas (3) for plasma generation in the quartz glass tube (1), applying a microwave to the quartz glass tube (1) so as to generate a hot plasma (4) in the quartz glass tube (1) and to preheat the quartz glass tube (1), and then discontinuing the supply of the gas (4) for plasma generation while applying the microwave, thereby causing the quartz glass tube (1) to absorb the microwave. With this method the quartz glass tube (1) can be heated to a sufficient temperature in a very quick and clear manner.