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发明名称
FORMATION OF MULTILAYER INTERCONNECTION
摘要
申请公布号
JPH01185923(A)
申请公布日期
1989.07.25
申请号
JP19880011115
申请日期
1988.01.20
申请人
NEC CORP
发明人
KANEKO WAKAHIKO
分类号
G09F9/35;G09F9/40;H01L21/027;H01L21/30;H01L21/306;H01L21/3213
主分类号
G09F9/35
代理机构
代理人
主权项
地址
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