发明名称 |
Method for the crucible-free floating zone pulling of semiconductor rods and an induction heating coil therefor |
摘要 |
A method for pulling silicon semiconductor rods, in particular having diameters of 10cm and over. The current methods of crucible-free float zoning or float zone pulling can be markedly improved if the molten cap like zone which develops is forced inwardly in the growth process. This is accomplished with the aid of electromagnetic forces in an annular zone situated opposite the coil slot. The electromagnetic forces can be achieved by using induction heating coils whose coil surface facing the molten cap is provided with annular segments whose thickness increases from their inner periphery ouotwardly and which are disposed opposite the coil slot above the peripheral region of the molten cap.
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申请公布号 |
US4851628(A) |
申请公布日期 |
1989.07.25 |
申请号 |
US19880281499 |
申请日期 |
1988.12.08 |
申请人 |
WACKER-CHEMITRONIC |
发明人 |
AMMON, WILFRIED V.;HENSEL, WOLFGANG;KLINGER, HEINZ |
分类号 |
C30B13/00;C30B13/20;C30B13/30;H01L21/208;H05B6/30 |
主分类号 |
C30B13/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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