Producing lithium niobate waveguide structures

摘要

An improved method producing a lithium niobate waveguide device is described, and comprises; (i) providing an optical waveguide path on a lithium niobate substrate; (ii) depositing a layer of dielectric material on the substrate; (iii) depositing a layer of conducting material on the dielectric layer; (iv) defining one or more electrode tracks on the conducting layer using a suitable mask; and (v) dry etching using an auto-registered process to remove the unmasked regions of the conducting layer and dielectric layer using a suitable etching medium.