发明名称 Oscillating quartz atomic force microscope
摘要 This atomic force microscope includes a pointed tip (1) mounted on top of an oscillating crystal (2) which is translatable in xyz-directions by a conventional xyz-drive (4). A potential applied to a pair of electrodes (5, 6) coated on opposite faces of the crystal (2) causes the latter to oscillate with its resonance frequency. As the tip (1) is approached to a surface to be investigated, the frequency of oscillation of the crystal deviates from its original frequency. This deviation can be used in a feedback loop to control the distance in z-direction of the tip (1) from the surface being investigated and to plot an image of the contour of each scan performed by the tip (1) across the surface.
申请公布号 US4851671(A) 申请公布日期 1989.07.25
申请号 US19880164941 申请日期 1988.03.07
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 POHL, WOLFGANG D.
分类号 G01B7/34;G01B21/30;G01L1/08;G01L1/16;G01N23/00;G01N37/00;G01Q10/06;G01Q20/04;G01Q60/32;G01Q60/38;H01J37/26 主分类号 G01B7/34
代理机构 代理人
主权项
地址