发明名称 |
Oscillating quartz atomic force microscope |
摘要 |
This atomic force microscope includes a pointed tip (1) mounted on top of an oscillating crystal (2) which is translatable in xyz-directions by a conventional xyz-drive (4). A potential applied to a pair of electrodes (5, 6) coated on opposite faces of the crystal (2) causes the latter to oscillate with its resonance frequency. As the tip (1) is approached to a surface to be investigated, the frequency of oscillation of the crystal deviates from its original frequency. This deviation can be used in a feedback loop to control the distance in z-direction of the tip (1) from the surface being investigated and to plot an image of the contour of each scan performed by the tip (1) across the surface.
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申请公布号 |
US4851671(A) |
申请公布日期 |
1989.07.25 |
申请号 |
US19880164941 |
申请日期 |
1988.03.07 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
POHL, WOLFGANG D. |
分类号 |
G01B7/34;G01B21/30;G01L1/08;G01L1/16;G01N23/00;G01N37/00;G01Q10/06;G01Q20/04;G01Q60/32;G01Q60/38;H01J37/26 |
主分类号 |
G01B7/34 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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