| 摘要 |
PURPOSE:To execute a measurement of an exposure energy distribution in a short time by inserting a sheet to which a drug discolored by ultraviolet rays is applied, into an exposure stage of a contact aligner, radiating ultraviolet rays and inspecting visually a discoloring state of the sheet. CONSTITUTION:A test sheet 1 is constituted of a polarized photosensitive film, a test mask 2 is constituted of a thin plate made of a material for allowing ultraviolet rays not to transmits through, and openings 2a-2j are pierced on this mask 2. Subsequently, the test mask 2 is allowed to adhere closely to the test sheet 1 as indicated with arrows (m)-m'', it is inserted into an exposure stage of a contact aligner, and ultraviolet rays are radiated as indicated with an arrow (u). By comparing and inspecting visually photosensitive discoloring marks 3a-3i corresponding to the openings 2a-2i after ultraviolet rays are radiated in such a way, the uniformity of ultraviolet-ray energy density is decid ed. According to such constitution, the uniformity of a distribution of energy density can be decided by a test exposing operation of once. |
