| 摘要 |
PURPOSE:To obtain excellent C/N in a short wavelength region and durability by forming a thin hard carbon film contg. any of boron, titanium and silicon on a thin ferromagnetic metallic film, then disposing a lubricating agent having a reaction group continuously by a vacuum deposition method. CONSTITUTION:While a substrate 1 for treatment formed with the thin ferromagnetic metallic film on a high-polymer films is taken up, gaseous CH4 and gaseous B2H6 are introduced into a vessel and a diamond-like thin hard carbon film contg. B or Ti and Si is formed by high frequencies. Perfluorostearic acid is then deposited by vacuum evaporation thereon. Then, the lubricating agent reacts strongly with a part of the thin hard carbon film and prevents stress concentration even if the thin hard carbon film is formed thin and, therefore, the sufficient protective effect is obtd. and the spacing loss is decreased. |
