CLEANING DEVICE AND CLEANING METHOD,申请号JP19880009849-传众专利搜索

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发明名称	CLEANING DEVICE AND CLEANING METHOD
摘要
申请公布号	JPH01184926(A)	申请公布日期	1989.07.24
申请号	JP19880009849	申请日期	1988.01.20
申请人	MATSUSHITA ELECTRIC IND CO LTD	发明人	HIROFUJI YUICHI;NAKAO ICHIRO;ONISHI TERUTO;DANSUI YOSHITAKA;SUZUKI MOTOMITSU;SHIMIZU YOSHIYUKI;NAGAHAMA MITSUYASU
分类号	H01L21/304;B08B3/04;B08B3/10	主分类号	H01L21/304
代理机构		代理人
主权项
地址

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