发明名称 MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要 PURPOSE:To ensure the adhesion of a metallic frame with a heat block and the isolation of the frame from the heat block and to prevent the deformation of the frame by a method wherein a permanent magnet is provided on the heat block, which is used as a pedestral, and a magnetic force is fed to the frame by electromagnets from the outside. CONSTITUTION:A magnetic force feeding terminal 9 coming into contact with a metallic frame 2 is magnetized by supplying a current to electromagnets 10 from a magnetization direction change-over power supply unit 11 and is given a polarity reverse to that of a permanent magnet 8. The frame 2, a die pad 2a and outer leads 2b are magnetized and they and a heat block 5 within the magnet 8 attract to each other to adhere. An electrode 1a of a semiconductor chip 1 is connected with the lead 2b by a fine metal wire 4. The polarities of the magnets 10 are changed-over into the same polarity as that of the magnet 8 by the unit 11. The frame 2, the pad 2a and the leads 2b repulse against the magnetic force of the magnet 8 and are levitated. The frame 2 is fed and is connected to the chip 1 on the following pad 2a by a fine wire 4. Thereby, the adhesion of the frame 2 with the block 5 and the isolation of the frame 2 from the block 5 become secure and the deformation of the frame 2 is prevented.
申请公布号 JPH01184839(A) 申请公布日期 1989.07.24
申请号 JP19880006111 申请日期 1988.01.13
申请人 MITSUBISHI ELECTRIC CORP 发明人 YOSHINO KAZUHIRO
分类号 H01L21/60 主分类号 H01L21/60
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