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发明名称
THIN FILM FORMATION
摘要
申请公布号
JPH01184928(A)
申请公布日期
1989.07.24
申请号
JP19880009882
申请日期
1988.01.20
申请人
TOSHIBA CORP
发明人
TAKAHASHI MITSUYUKI
分类号
C23C16/30;C23C16/44;C23C16/50;C23C16/54;H01L21/205;H01L21/31;H01L21/336;H01L29/78;H01L29/786
主分类号
C23C16/30
代理机构
代理人
主权项
地址
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