发明名称 FORMATION OF SUPERCONDUCTING THIN FILM
摘要 PURPOSE:To form a high-temperature superconducting thin film on a substrate in a short time on an industrial scale, by mixing fine powder of oxides of La or Y, Ba, Sr or Ca and Cu using a specific mixing procedure, depositing the powder on a hot substrate and sintering the powder. CONSTITUTION:Fine powder of oxides of La, Y, Ba, Sr, Ca or Cu can be produced in large quantities in a short time, either by generating arc discharge using an electrode composed of the oxides of La, Y, Ba, Sr, Ca or Cu, irradiating electron ray to the oxides of La, Y, Ba, Sr, Ca or Cu, applying microwave radiation to the oxides of La, Y, Ba, Sr, Ca or Cu or mechanically crushing the oxides of La, Y, Ba, Sr, Ca or Cu. The oxide fine powder produced in large quantities in a short time is deposited on a hot substrate and sintered to obtain a high-temperature superconducting thin film on a substrate having large area or on a number of substrates at the same time, in a short time on an industrial scale.
申请公布号 JPH01183453(A) 申请公布日期 1989.07.21
申请号 JP19880006840 申请日期 1988.01.18
申请人 FUJITSU LTD 发明人 ESHITA TAKASHI;TSUKUNE ATSUHIRO;FURUMURA YUJI
分类号 H01L39/24;C01G1/00;C04B35/00;C04B35/45;C04B41/87;H01B12/00 主分类号 H01L39/24
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