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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH01183843(A)
申请公布日期
1989.07.21
申请号
JP19880009958
申请日期
1988.01.19
申请人
MITSUBISHI ELECTRIC CORP
发明人
HONDA HIROMI
分类号
H01L27/06;H01L21/331;H01L21/8249;H01L29/72;H01L29/73;H01L29/732
主分类号
H01L27/06
代理机构
代理人
主权项
地址
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