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发明名称
PLASMA ETCHING
摘要
申请公布号
JPH01183822(A)
申请公布日期
1989.07.21
申请号
JP19880010421
申请日期
1988.01.19
申请人
SUMITOMO METAL IND LTD
发明人
HAYASHI NOBUO;TOBINAGA YOSHIICHI
分类号
H01L21/302;H01L21/3065
主分类号
H01L21/302
代理机构
代理人
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地址
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