| 摘要 |
PURPOSE:To enable the production of the title sintered product of high density and thermal conductivity even at the same level of the sintering temperature for alumina by sintering a powder composition comprising ultrafine particles of AlN containing less than a specific amount of oxygen impurity and a sufficient amount of YF3 sufficient to cover all over the ultrafine particles. CONSTITUTION:Ultrafine particles of AlN which are obtained by high-frequency thermal plasma, having less than 0.1 micron average particle size and less than 10wt.% oxygen content as an impurity are combined with less than 20wt.% of YF3 as a sintering aid to prepare an AlN powder composition. Then, the powder composition is kept at a constant temperature ranging from 1150 deg.C to 1250 deg.C so that the YF3 melts to cover all over the ultrafine particles. Then, sintering is conducted over 1,400 deg.C to give the title sintered product of a high density and 100W/m.K or more thermal conductivity. |
