| 摘要 |
PURPOSE:To enable a thin ceramic sheet to be polished with extremely high accuracy by constituting the surface contacting said sheet from a substance having a perforated or finely rough surface to prevent the accuracy of said sheet from degradation due to excessive thickness of layers of adhesives. CONSTITUTION:A perforated plate 11 made of sintered metal or ceramic, etc. is bonded to a bed seat M of ferromagnetic body to correspond to a polishing table bed for magnetic adsorption. Adhesives of one kind of thermoplastic substances are fully impregnated and adsorbed in the perforated plate 11 to moisten and cover the surface contacting a workpiece S with an uniformly thin adhesive film and then mount the workpiece S on the adhesive film so that if necessary the reheating process is carried out to fully bond the perforated plate 11 to the workpiece S. Then, the heated adhesives are liquefied to present a capillary phenomenon so that the adhesives having an extremely thin uniform film thickness carry out an adhesive action provided fully with a necessary holding force for polishing the workpiece S. Thus, an extremely high accuracy ceramic sheet can be polished. |
