| 摘要 |
<p>PURPOSE:To unify a driving source so as to miniaturize the structure of an article shifting device as a whole by providing a driving control system which can connect or disconnect a brake or a clutch so that the linear motion or rotating motion of an article holding part can be made selectively. CONSTITUTION:A brake 45 is put on in order to fix the first rotating body 22, and a clutch 51 is disconnected. Next, the rotating shaft is rotated by a driving source 27, thereby giving linear motion to a wafer holding part 40 so that a wafer 30 can be taken out from the first wafer cassette. Next, the brake 45 is released, while the clutch 51 is connected. Then, the first rotating body (pulley) 22 is rotated by the driving source 27, thereby swinging the wafer holding part 40 as an integrated body together with the first and second arms 31 and 32 so that the wafer 39 is situated over the second wafer cassette. After this, this holding part 40 makes linear motion toward the second wafer cassette, so that the wafer 39 is inserted or shifted into the second wafer cassette.</p> |
