| 摘要 |
<p>PURPOSE:To enable alignment accurately and quickly by compensating the position of detection of a linear image sensor by the quantity of strain stored. CONSTITUTION:The quantities of strain due to optical aberration existing in alignment optical systems 3-1, 3-2 are measured previously, and stored beforehand in a memory 6. The quantities of strain stored are used for two linear image sensors mounted at 45 deg. to X and Y axes. On alignment, the quantities of strain are compensated to the positions of images in each linear image sensor of collating lines perpendicular to each other and organizing '#' marks 1, 1' and '+' marks 2, 2', and the correct amount of the movement of the X and Y axes is acquired by calculation from each position compensated. Movement compensated in this manner is obtained regarding the alignment marks at two positions, and a board 2 to be exposed is shifted by an X and Y moving mechanism 4a and alignment is attained. Accordingly, the overrun, etc., of the transfer of the board 2 to be exposed generated by the aberration of the optical systems are removed, thus accurately aligning the board 2 to be exposed rapidly.</p> |
