| 摘要 |
PURPOSE:To prevent flawing of the other face and sticking of dust and dirt to a disk-shaped substrate by forming a warpage preventive layer on the other surface of the disk-shaped substrate prior to formation of a reflecting film or recording film on one surface of said substrate. CONSTITUTION:This method has a stage for forming the warpage preventive layer 5 on the other surface of the disk-shaped substrate 1, a stage for forming the reflecting film 2 or the recording film on one surface of the substrate 1, and a stage for forming a protective film 3 covering this reflecting film 2 or recording film and the disk is produced in order of these stages. The warpage of the substrate 1 on which the warpage reflecting layer 5 is formed is measured so that the thickness of the protective film 3 can be so adjusted as to negative the warpage in the stage for forming the protective film 3. Sticking of the flaws, dust, dirt, etc., to the surface at the time of forming the respective films 2, 3 is thereby obviated. The warpage of the substrate 1 is suppressed as far as possible. |
