| 摘要 |
PURPOSE:To enable easy formation of wiring and to realize three dimensional wiring by eliminating steps, by providing a wiring section of ceramic superconductive substance and by filling therebetween with insulating substance whose main element is the same as the ceramic superconductive substance. CONSTITUTION:An insulation film 12 of silicon dioxide, etc., is formed on a silicon substrate 11 and a thin film composed of the main element of ceramic superconductive substance is formed entirely thereon. A key element which develops superconductivity at a high temperature is contained only to a wiring section 13. Although the area between the adjacent wiring section 13 is composed of ceramic of the same main element, it serves as an insulating section 14, which exhibits no superconductivity or is superconducting only at extremely low temperature. In this way, steps at the wiring section is avoided and a process for flattening is eliminated thus allowing easy multilayer wiring. |
