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发明名称
SEMICONDUCTOR MANUFACTURING APPARATUS
摘要
申请公布号
JPH01181414(A)
申请公布日期
1989.07.19
申请号
JP19880002868
申请日期
1988.01.08
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
SASAI YOICHI;ONAKA SEIJI;OGURA MOTOTSUGU
分类号
H01L21/22
主分类号
H01L21/22
代理机构
代理人
主权项
地址
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