发明名称 SEMICONDUCTOR INTEGRATED CIRCUIT HAVING INTERCONNECTION WITH IMPROVED DESIGN FLEXIBILITY
摘要 A semiconductor integrated circuit is supplied with a power source voltage (VEE) to a circuit element forming layer (23a) thereof from a conductive layer (42) through a substrate (41, 41A, 41B, 41C) and a certain region (44, 24a, 44a) made of a semiconductor type identical to that of the substrate. The conductive layer is formed on a back surface of the substrate, and the certain region makes contact with a front surface of the substrate. The circuit element forming layer is provided on the front surface side of the substrate and connects to the certain region. Alternatively, a region (90A, 90B, 90C) may be provided to extend from the circuit element forming layer to the substrate so as to provide a conductive path for supplying the power source voltage from the back surface of the substrate.
申请公布号 EP0307844(A3) 申请公布日期 1989.07.19
申请号 EP19880114886 申请日期 1988.09.12
申请人 FUJITSU LIMITED 发明人 KOKADO, MASAYUKI
分类号 H01L21/8222;H01L21/331;H01L23/528;H01L23/535;H01L27/06;H01L29/73;H01L29/732 主分类号 H01L21/8222
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