| 摘要 |
<p>PURPOSE:To obtain highly mechanical rigidity and excellent controllability by directly driving a Y table without using a joint by a linear motor constituted by a flatly wound coil and a magnetic circuit that forms a magnetic filed perpendicular to the XY plane and opposed to each other. CONSTITUTION:When a X table 40 is driven by a X motor 20, a coil 33 also moves in the arrow X direction together with the X table 40. However, since the difference between the internal diameter L of the coil in the X direction and length l of magnetic circuits 31, 33 is set larger than the amount of transfer of the X table 40, the performance of a Y motor 30 as a motor does not change. Also, since the winding direction of a coil in the magnetic filed formed by magnetic circuits 31, 32 and the X direction are parallel, the linear motor 30 does not receive resistance or thrust to the movement in the X direction. This makes it possible to enhance mechanical rigidity and improve controllability.</p> |
