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发明名称
FORMATION OF THIN FILM FOR CAPACITOR
摘要
申请公布号
JPH01181431(A)
申请公布日期
1989.07.19
申请号
JP19880002886
申请日期
1988.01.08
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
ONISHI TERUTO
分类号
H01L21/316;H01L21/314;H01L21/822;H01L27/04
主分类号
H01L21/316
代理机构
代理人
主权项
地址
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