| 摘要 |
<p>PURPOSE:To discover at an early stage the problem in the internal part of a process and to take countermeasures by forecasting the generation of a process defective by the on-line supervision of the cause-effect relationship data composed of a quality deterioration contribution ratio calculated statistically and the process actual results beforehand. CONSTITUTION:A process supervising part 1 supervises the process information of a process control part 11, refers to cause-effect relationship data 3 and outputs a quality deterioration alarm 2. From the process control part 11, the data item, in which the data for analyzing quality obtained from work control information 12, process actual result data 13 and characteristic data 14 meet the purpose of the analysis from a quality data base 31, is extracted, process related data are referred to, the specification of the factor process and the designation of the related data item are executed and a statistical processing part 4 is activated. At the statistical processing part 4, the correlation of the deterioration of a characteristic and the actual results of the factor process and the contribution ratio for the quality deterioration are calculated and the cause-effect relation data 3 are updated.</p> |
