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经营范围
发明名称
SPUTTERING METHOD
摘要
申请公布号
JPH01180969(A)
申请公布日期
1989.07.18
申请号
JP19880005153
申请日期
1988.01.13
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
ONISHI YOICHI;TAKEBAYASHI MIKIO;KIMURA TADASHI;IKEDA TANEJIRO
分类号
C23C14/22;C23C14/00
主分类号
C23C14/22
代理机构
代理人
主权项
地址
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