发明名称 PROTECTIVE DUSTPROOF BODY FOR MASK HAVING IMPROVED PEELABILITY
摘要 <p>PURPOSE:To improve the peelability from a film forming base material and to easily obtain a uniform and defectless protective dustproof body for a mask by using specific polyvinyl acetal having a fluorine-contained silyl group at the side chain. CONSTITUTION:The protective dustproof body consisting of the polyvinyl acetal which is expressed by the formula I, contains the silyl-substd. vinyl alcohol component expressed by x2/x1 at >=0.05 ratio, contains <=10mol.% vinyl acetate component and has >=60mol.% rate of acetalization. In the formula I, R<1>-R<3> denotes an alkyl group of 1-10C and a group in which the hydrogen atom of at least one group thereof is partly or wholly substd. with a fluorine atom; R denotes an alkyl group of 1-3C. The peelability from the film forming base material is thereby improved and the uniform and defectless protective dustproof body for the mask is produced at a good yield.</p>
申请公布号 JPH01179946(A) 申请公布日期 1989.07.18
申请号 JP19880003051 申请日期 1988.01.12
申请人 TOSOH CORP 发明人 OSHIMA KENSHO;UCHIKURA MASAKI;ONO HIDEKI
分类号 G03F1/00;H01L21/027;H01L21/30 主分类号 G03F1/00
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