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发明名称
SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH01179424(A)
申请公布日期
1989.07.17
申请号
JP19880001086
申请日期
1988.01.06
申请人
MITSUBISHI ELECTRIC CORP
发明人
GOTO AKIO
分类号
H01L21/60;H01L23/52
主分类号
H01L21/60
代理机构
代理人
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地址
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