| 摘要 |
<p>PURPOSE:To maintain a prescribed distance between a magnetoresistance element and a substance to be measured, by providing a base which is maintained at a prescribed distance to this substance by its contact with the substance, and the magnetoresistance element which is formed on this base. CONSTITUTION:A recessed part 11a is formed in a base 11 made of Si, and a magnetoresistance element 12 is formed on the bottom surface of the recessed part 11a. A substance 13 to be measured, which is a rotary body on the outer peripheral surface of which N-poles and S-poles are formed sequentially, is in contact with the base 11 at the opposite ends of the recessed part 11a. Accordingly, the part of the substance 13 facing the recessed part 11a intrudes into the recessed part 11a. In a first embodiment thus constituted, a spacing distance (d) is maintained to be prescribed, since the base 11 and the substance 13 to be measured are in contact with each other at the opposite ends of the recessed part 11a and since Si constituting the base 11 has a high abrasion resistance.</p> |
