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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH01179361(A)
申请公布日期
1989.07.17
申请号
JP19880000949
申请日期
1988.01.05
申请人
NEC CORP
发明人
KUNIO TAKEMITSU
分类号
H01L29/78
主分类号
H01L29/78
代理机构
代理人
主权项
地址
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