PATTERNING,申请号JP19880000924-传众专利搜索

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发明名称	PATTERNING
摘要
申请公布号	JPH01179328(A)	申请公布日期	1989.07.17
申请号	JP19880000924	申请日期	1988.01.05
申请人	NEC CORP	发明人	HIURA YUKO
分类号	H01L21/302;H01L21/3065;H01L21/31	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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