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发明名称
METHOD AND APPARATUS FOR FORMING THIN FILM BY CVD
摘要
申请公布号
JPH01179410(A)
申请公布日期
1989.07.17
申请号
JP19880001705
申请日期
1988.01.07
申请人
NIKON CORP
发明人
KATSURAI KUMIKO
分类号
H01L21/205;H01L21/263
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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