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发明名称
SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH01175262(A)
申请公布日期
1989.07.11
申请号
JP19870332689
申请日期
1987.12.29
申请人
NIPPON DENSO CO LTD
发明人
KUROYANAGI AKIRA;FUNAHASHI TOMOHIRO
分类号
C30B29/06;H01L21/20;H01L21/336;H01L27/00;H01L29/78;H01L29/786
主分类号
C30B29/06
代理机构
代理人
主权项
地址
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