发明名称 Wafer and method of making same
摘要 Disclosed is a wafer substrate for integrated circuits 1 which by itself may be made either of conductive or non-conductive material. This substrate carries two planes or layers of patterned metal 19,20, thus providing two principal levels of interconnection. A programmable amorphous silicon insulation layer 21 is placed between the metal layers. There are sheet lower metal layers with an insulator which permit power distribution across the wafer. Connections between the metal layers or between the metal layer and the substrate can be made through via holes in the insulator layers or layers, respectively. Pedestals are provided for bonding.
申请公布号 US4847732(A) 申请公布日期 1989.07.11
申请号 US19880204997 申请日期 1988.06.08
申请人 MOSAIC SYSTEMS, INC. 发明人 STOPPER, HERBERT;PERKINS, CORNELIUS C.
分类号 H01L23/14;H01L23/538;H01L23/58;H01L25/16 主分类号 H01L23/14
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