| 摘要 |
An apparatus for treating a work item includes a cover member and a base member on which the cover member is supported. A work space is defined between the base member and the cover member for receiving at least one associated work item which is positioned therein. A first sealing member is positioned between the base member and the cover member for sealing the work space against the environment. A hood member is provided for enclosing the cover member and defining a heating and cooling space therebetween. A cooling apparatus is also provided for cooling the first seal member. The cooling apparatus comprises a first cooling fluid channel which is secured to the base member, a second cooling fluid channel which is secured to the cover member and a cooling fluid trough which is secured adjacent to the second cooling fluid channel.
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