Device for measuring rectilinear motion

摘要

Disclosed is a rectilinear motion measuring device which measures the X- and Y-axis displacement errors by detecting displacements of a rectilinearly moving body, while measuring the pitching and yawing errors by detecting the angle of inclination of the moving body and measuring the rolling error by detecting the displacement of the moving body at two different positions. For these purposes, the rectilinear motion measuring device is provided with means for detecting the displacement of the light source of a luminous flux generating means, means for detecting the displacements of the moving body on a magnified scale of x2n, and means for detecting the angle of inclination of the rectilinearly moving body. On measuring the respective error components, the fluctuations of the light source are corrected to preclude variation factors of the light source itself, enhancing the resolution and the accuracy of the measurement by providing separately a displacement detecting optical path and an angle detecting optical path.