Method of producing magnetic films of Fe-Si-Al alloy

摘要

A method of producing a magnetic film of Fe-Si-Al alloy in which argon is entrapped, by using a DC magnetron sputtering apparatus to apply RF bias to a substrate thereby depositing a Fe-Si-Al alloy film on the substrate. The alloy film produced has a thermal expansion coefficient of 110x10-7 to 170x10-7 DEG C.-1 and the substrate has a thermal expansion coefficient of 100x10-7 to 135x10-7 DEG C.-1. The amount of argon entrapped in the alloy film is controlled within the range of 0.01 o 0.3 weight percent so as to substantially zero the internal stresses in the alloy film.