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发明名称
MANUFACTURE OF THIN DIELECTRIC FILM
摘要
申请公布号
JPH01172559(A)
申请公布日期
1989.07.07
申请号
JP19870330762
申请日期
1987.12.25
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
FUJIWARA NORIO
分类号
C23C14/08;C23C14/46;H01B3/00
主分类号
C23C14/08
代理机构
代理人
主权项
地址
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