DIAMOND-LIKE THIN FILM AND METHOD FOR MAKING THE SAME

摘要

A diamond-like thin film is obtainable by a sputtering process involving applying electric power under a limited hydrogen pressure within a sputtering apparatus (1) having a graphite target (2), thereby forming, on a substrate (5), a diamond-like thin film comprising an accumulation of particles having a size from several nm to several 100 nm, said particles having its surface enclosed with alkyl radicals having up to 3 carbon number and an interior with a diamond-like structure with a four coordinated carbon arrangement.