| 摘要 |
<p>PURPOSE:To decompose ozone with high efficiency by heating even at low temp. and to prevent the increase of the cost by heating a gaseous mixture contg. ozone after adding a reactive material with ozone to the gaseous mixture. CONSTITUTION:A gas contg. ozone, such as waste gas from an ashing device of a semiconductor wafer, etc., is discharged to a gas-liquid mixing tank 6 through a pipe 7 from plural holes 10 of a gas dispersing plate 9. In this stage, a reaction liquid having reactivity with ozone, such as ethylene glycol, is stored previously in the gas-liquid mixing tank 6, and the reaction liquid is mixed with the ozone-contg. gas. The gaseous mixture accompanying only the vapor of the reaction liquid after removing the liquid in a gas-liquid separating device 15, is introduced into a chamber 16. In the chamber 16 heated by a heater 18, ozone is decomposed by heating, and an oxidation reaction with the vapor of the reaction liquid proceeds parallelly at the same time. Thus, ozone is decomposed easily to below a predetermined concn.</p> |
