发明名称 WIRE SAW
摘要 <p>PURPOSE:To improve the abrasion resistance of a wire and reduce the abnormality in dimension of a cut member or the breakage of wire even when the feed speed of the wire is low by coating the surface of a cutting wire with a thin film of ceramic. CONSTITUTION:The surface of a steel wire cutting wire 1 is coated with a ceramic layer 2 to form a wire saw with high abrasion resistance. The wire saw thus formed is fed at a low speed to cut silicone and ceramics with high accuracy without accompanying the breakage of the steel wire 1.</p>
申请公布号 JPH01171752(A) 申请公布日期 1989.07.06
申请号 JP19870329139 申请日期 1987.12.25
申请人 FUJI ELECTRIC CO LTD 发明人 YAMADA YASUO
分类号 B24B27/06;B23D61/18;H01L21/301 主分类号 B24B27/06
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